mag.x 125宽场显微镜系统
The Optem® mag.x system 125 represents a new class of optical systems that enable microscope-like resolution with wide fields-of-view supporting modern high-resolution sensors up to 57 mm diameter. The variable system is fully modular and ideally suited for submicron imaging in inspection and measurement applications. The modular approach enables adaptation of the system to many applications ranging from a straightforward optical system without illumination to a full featured system including coaxial illumination and closed loop autofocus.
宽视场高分辨率成像
mag.x system 125采用可集成的自动对焦模块，可在自动化工业环境中完成最严格的检验需求。各种验查应用均可从“闭环”自动对焦解决方案中受益，延长周期时间，从而提高吞吐量。
High resolution inspection is being used in many applications. Each application has its own requirements and constraints. In order to cater for all these diverse needs, the mag.x system 125 is as modular as they come. Integration of customized elements is easy and enables a system that integrates seamlessly into the surrounding equipment. The mag.x 125 system can be combined with our range of objective lenses, tube lenses, illumination tubes, autofocus modules, mounting plates and other accessories to meet your application needs.
Our Quality Criteria:
- 采用创新光学设计的精密工程
- 物体和图像侧的确切远心度
- 衍射限制了整个成像圈的光学性能
- 精确动态自动对焦
理想应用：
Inspection and processing of semiconductor, flat-panel display (TFT & OLED) and printed circuit boards (PCB), micro measurement & metrology, MEMS & nanotechnology, fluorescence microscopy, digital pathology and many more.
| 物镜消色镜 | 镜筒透镜系统 | |||||||||||||||
| 1x | 2.25x | |||||||||||||||
| f'tub = 250 mm | f'tub = 563 mm | |||||||||||||||
| 2y' = 25 mm | 2y' = 57 mm | |||||||||||||||
| WD | f'obj | δ | R0 | M | 2y 毫米 | NA' | R'0 lp/mm | M | 2y 毫米 | NA' | R'0 lp/mm | |||||
| Magn./NA | 毫米 | 毫米 | µm | lp/mm | ||||||||||||
| 2x/0.08 | 24.8 | 125 | ± 42.7 | 293 | 2.0 | 12.5 | 0.04 | 147 | 4.5 | 12.5 | 0.018 | 65 | ||||
| 5x/0.2 | 13.0 | 50 | ± 6.8 | 733 | 5.0 | 5.0 | 0.04 | 147 | 11.25 | 5.0 | 0.018 | 65 | ||||
NA Numerical aperture in the object space = n · sin (σ)
WD Working distance
f'objFocal length of the objective
f'tubFocal length of the tube lens
δobjDepth of field at 546 nm δobj= ±n · λ/(2 · NA2)
R'0Cut-off frequency in image space at 546 nm
R0Cut-off frequency in object space at 546 nm; R0 = (2 · NA) / λ
2y' Image field size (maximum detector diagonal)
2y Object field size
M Magnification of the overall system; M = Mobj · Mtub
| 物镜消色镜 | 镜筒透镜系统 | |||||||||||||||
| 1x | 2.25x | |||||||||||||||
| f'tub = 250 mm | f'tub = 563 mm | |||||||||||||||
| 2y' = 25 mm | 2y' = 57 mm | |||||||||||||||
| WD | f'obj | δ | R0 | M | 2y 毫米 | NA' | R'0 lp/mm | M | 2y 毫米 | NA' | R'0 lp/mm | |||||
| Magn./NA | 毫米 | 毫米 | µm | lp/mm | ||||||||||||
| 2x/0.08 | 24.8 | 125 | ± 42.7 | 293 | 2.0 | 12.5 | 0.04 | 147 | 4.5 | 12.5 | 0.018 | 65 | ||||
| 5x/0.2 | 13.0 | 50 | ± 6.8 | 733 | 5.0 | 5.0 | 0.04 | 147 | 11.25 | 5.0 | 0.018 | 65 | ||||